Vol. 39, No. 6 - Proximal probe microscopes
The scanning SQUID (Superconducting Quantum Interference Device)
microscope is an extremely sensitive instrument for imaging local magnetic
fields. We describe one such instrument which combines a novel pivoting
lever mechanism for coarse-scale imaging with a piezoelectric tube scanner
for fine-scale scans. The magnetic field sensor is an integrated miniature
SQUID magnetometer. This instrument has a demonstrated magnetic field sensitivity
of < 10
gauss/
Hz
at a spatial resolution of
10 µ m. The design and operation of this scanning SQUID microscope
are described, and several illustrations of the capabilities of this technique
are presented. The absolute calibration of this instrument with an ideal
point source, a single vortex trapped in a superconducting film, is shown.
The use of this instrument for the first observation of half-integer flux
quanta, in tricrystal thin-film rings of YBa
Cu
O
-
,
is described. The half-integer flux quantum effect is a general test of
the symmetry of the superconducting order parameter. One such test rules
out symmetry-independent mechanisms for the half-integer flux quantum effect,
and proves that the order parameter in YBa
Cu
O
-
has lobes and nodes consistent with d-wave symmetry.

= h/2e = 20.7 gauss-µ m
.
Typically SQUID electronics dc-bias the device close to the superconducting
critical current, apply an ac modulation bias field to the loop, and feed
back on a dc bias field to keep the voltage output at the modulation frequency
constant. The dc feedback field is then directly proportional to the magnetic
flux through the loop. A scanning SQUID microscope scans the SQUID relative
to a sample to image the local magnetic fields with unprecedented sensitivity.
However, the design of such an instrument provides serious challenges.
The SQUID sensor requires a cryogenic environment, since it must be superconducting
to operate. The desired scan area, at least a few hundred microns on a
side, is extremely difficult to attain at low temperatures using piezoelectric
scanning elements. To obtain optimal resolution, it is necessary to make
the pickup loop of the SQUID very small, well shielded, and positioned
as close as possible to the sample surface. In this paper we describe one
such design which meets these difficult requirements.
There are many other techniques for imaging magnetic fields at surfaces [1]: decoration techniques [2], magneto-optical imaging [3], magnetic force microscopy [4], scanning Hall probe microscopy [5], scanning electron microscopy with polarization analysis (SEMPA) [6], and electron holography [7]. Each of these techniques has its own advantages: For example, the magneto-optical techniques are relatively simple and provide the possibility for time-resolved studies, and the electron microscope techniques have very good spatial resolution. The advantage of the scanning SQUID microscope is its very high sensitivity. A comparison of relative sensitivity and resolution for the different techniques appears in [8]. Roughly speaking, the scanning SQUID microscope is orders of magnitude more sensitive to magnetic fields than the other techniques. In addition, it gives an easily calibrated absolute value for the local magnetic fields. Both of these properties are indispensable, for example, for the measurements of the half-integer flux quantum effect described below. A disadvantage of this technique is its relatively poor spatial resolution: Resolution of 10 µ m has been demonstrated, and ultimate resolutions of < 1 µ m seem feasible, but SEMPA [6], for example, has a spatial resolution of 30-50 nm. Nevertheless, there are many possible applications for this technique which do not require submicron spatial resolution.
The first reported scanning SQUID microscope [9] used two sets of orthogonal screw mechanisms operating in liquid helium, driven by room-temperature stepper motors through connecting rods. A commercial radio-frequency (rf) SQUID sensor was inductively coupled to a multi-turn 230-µ m-inside-diameter pickup loop. The spacing between the pickup loop and the sample was fixed by the design of the instrument at about 50 µ m. This microscope was able to detect the presence of single flux quanta trapped in a superconducting niobium thin film, with a signal-to-noise ratio of about 5 and a spatial resolution of 500 µ m.
Succeeding scanning SQUID microscopes [10-14] used a number of different mechanical scanning mechanisms. Vu et al. [8] held the sample fixed at the end of a cryogenic Dewar cold finger. The sensor was attached to the radiation shields of the Dewar, and scanned by moving the radiation shields relative to the cold finger with a translation stage and stepper motors. Vu et al. [12] pivoted the sensor in direct contact with the sample to keep the sensor sample spacing constant during scanning. Black et al. [13] used a system of mechanical wedges driven by rods from room temperature. Ma et al. [14] scanned a room-temperature sample relative to the sensor immersed in liquid helium in a thin-wall Dewar.
Recent scanning SQUID microscopes have replaced discrete, hand-wound pickup loops with either discrete thin-film loops or pickup loops integrated into the SQUID sensor itself. Some designs have used the SQUID as the pickup element. This can be a drawback because of the influence of the fields generated by the SQUID on the system to be measured [13], or these fields can be used to probe the rf susceptibility of the system [15].
An expanded view of the sample region of the microscope is shown in
Figure
2(a). The SQUID sensor is mounted on a cantilever fabricated from
a 13-µ m-thick brass shim, and is run in direct contact with the
sample [Figure
2(b)] to compensate for height variations while scanning [12].
We have tested two different types of magnetometer. The first type is a
washer SQUID with a ten-turn input coil, and on a second substrate a micron-scale
pickup loop and "low"-inductance lead structure. Superconducting wire-bonded
leads are used to join the two components. The parasitic pickup area of
the leads is not a problem if the magnetic fields far from the pickup loop
are small or slowly varying. This design, while comparatively complex,
has the advantage of allowing the pickup loop structure to be fabricated
with a different process than that of the SQUID. For example, in our experiments,
the SQUID was fabricated using a planarized The second type of sensor we used is a fully integrated magnetometer
in which the pickup loop and lead structure form an integral part of the
SQUID's self-inductance ( The silicon substrate upon which the pickup loop is fabricated is polished
to a fine point typically one loop diameter from the center of the pickup
loop. An optical image of one such polished tip is shown in Figure
3. For most applications the substrate is oriented nearly parallel
to the sample plane, with the loop face down and the pointed tip in contact
with the sample, so that the loop samples primarily the normal component
of the field a few microns from the sample surface. The vertical spacing
between the loop and the sample, given by the tip-loop distance times the
sine of the sample plane/SQUID plane angle, is typically less than the
loop diameter, so that resolution and sensitivity are nearly optimized.
Figure
5 illustrates the sensitivity of the scanning SQUID microscope
to externally applied fields. This is an image of the magnetic field about
2.5 µ m above a thin-film superconducting niobium meander with 10-µ
m linewidth and spacing. This image was taken with the 10-µ m-diameter
pickup loop oriented about 20 Figure
6 illustrates the sensitivity of the scanning SQUID microscope
to electrical currents. This image is of the upper third of the same niobium
thin-film meander as in Figure
5. In this case the 10-µ m-diameter SQUID pickup loop is oriented
perpendicular to the sample plane, and nearly parallel to the long lines
in the meander pattern. A 134-Hz, 100-nA ac current is applied to the meander.
The signal from the SQUID is phase-sensitively detected using a lock-in
amplifier. The image shows alternating magnetic field directions associated
with the alternating current directions as the current follows the meander
pattern. The point-to-point rms noise in this image corresponds to an effective
noise at the SQUID loop of 2.5 × 10 Figure
8 shows an expanded view of one of the flux vortices trapped in
the bulk of the SQUID washer of Figure
7. Superposed on the magnetic image is a scaled and properly oriented
schematic of the sensor SQUID pickup loop and leads. This superposition
shows that the shape of the vortex image is determined by the shape of
the pickup loop, the asymmetry being a direct consequence of the pickup
area of the coplanar leads. The field from an isolated superconducting
vortex is given by
for distances r much greater than the penetration depth. The
sensitivity of this instrument can be estimated by considering a circular
loop of radius r At the easily attained height h = r The resolution of the instrument can be defined using a Rayleigh-like
criterion [22],
as illustrated in Figure
9. This figure shows the cross sections predicted for the loop
geometry and orientation of Figure
8, for two point vortices. The dashed lines are the individual contributions,
and the solid line is the total predicted signal. The spacing between the
two vortices has been adjusted until the predicted minimum is 81% of the
maxima. This happens for a spacing of 11.2 µ m. We therefore define
the resolution of this tip-loop geometry and orientation as 11.2 µ
m.
Figure
10 shows the predicted resolution and total flux coupling into
the loop for magnetic monopole sources, such as superconducting vortices,
using the Rayleigh-like criterion, assuming a hexagonal pickup loop oriented
parallel to the sample surface. This figure shows that the ultimate resolution
is set by the diameter of the loop, and that the signal falls off rapidly
as the loop is moved away from the surface. These curves would look different,
for example, for a dipole source, but superconducting vortices provide
a convenient calibration point source for the scanning SQUID microscope.
Recently Tsuei et al. [31]
proposed a definitive test of the symmetry of the YBa Figure
11 shows a schematic of the sample used by Tsuei et al. [31]
to make the first measurements of the half-integer flux quantum. The sample
is fabricated on a SrTiO I = -|I where I There is an intrinsic degeneracy involved in this analysis: The positive
lobe of the polar plots in Figure
11 can be arbitrarily assigned to either the (100) or (010) directions
in any of the three regions. It is easy to show that however these assignments
are made, the three-junction ring always has either one or three negative
critical currents, so that the half-integer flux quantum effect should
always be observed. The YBa In this experiment, four rings (inner diameter = 48 µ m, width
= 10 µ m) are patterned using a standard photolithographic process.
To test the quality of the individual grain-boundary junctions across each
grain boundary, bridges 25 µ m in length and 10 µ m in width
across each grain boundary are prepared on bicrystal substrates that were
cut off from the tricrystal substrate. The epitaxial YBa From the I Figure
12 shows a scanning SQUID microscope image of the four rings of
Figure
11. This image was obtained at 4.2 K with a 10-µ m-diameter pickup
loop rotated approximately 20 The image of the half-flux quantum in the central ring of Figure
12 is asymmetric because of the additional pickup area of the unshielded
leads in this sensor geometry. We have recently repeated these measurements
with a loop with a 4-µ m pickup loop diameter, with much better shielding
of the leads. These images show much less asymmetry, as well as much better
spatial resolution. Since the circulating supercurrents associated with
the half-flux quantum are localized in a nearly two-dimensional plane,
it is possible to deconvolute the magnetic field images to obtain the current
distribution [33].
Figure
13 shows a deconvoluted image of the circulating supercurrents
associated with the half-flux quantum in the ground state of the three-junction
ring. There are two spikes in the data which are associated with flaws
in the edges of the ring. This image shows that the supercurrents are in
fact slightly localized at the edges of the ring due to self-screening
effects. There is about 10 µ A of supercurrent flowing around the
ring in this image.
It is extremely important to determine exactly how much flux is trapped
in the rings. We determined the amount of flux in each ring using three
different methods, which agree with one another to within 10%. The first
method is direct calculation. The mutual inductance M( where the integral d Figure
14 shows a top view of the same data as in Figure
12. The solid lines in the bottom part of Figure
14 are model calculations for the cross sections indicated by the contrasting
lines in the image, assuming that The second method for calibrating the response of the SQUID pickup loop
to flux in the rings is made by positioning the pickup loop in the centers
of the rings and measuring the SQUID output vs. field characteristic. Representative
results for the three-junction ring are shown in Figure
15(a). In this figure a linear background, measured by placing
the loop over the center of the zero-junction control ring, has been subtracted
out. The upper insert in this figure shows the sensor flux vs. field characteristic
over a larger field range. At low fields, stepwise admission of flux into
the ring leads to a staircase pattern, with progressively smaller heights
and widths to the steps, until over a small intermediate field range, shown
for increasing field in the main part of Figure
15(a), single flux quanta are admitted. We interpret the "noise" in
these data as flux motion in the grain boundaries and the other rings.
At larger fields the steps disappear and the SQUID flux vs. field characteristic
slowly oscillates about a mean line. The heights of the single flux-quantum
steps in the intermediate field region, derived by fitting the data to
a linear staircase (dashed line) are We calibrated our fields by replacing the sample with a large-pickup-area
SQUID magnetometer. Our measured fields agree with our calculations to
within about 3%. The widths of the steps, averaging 11 measurements for
increasing positive fields, were 5.7 ± 1 mG. This is about 25% smaller
than Figure
15(b) summarizes the results from twelve cooldowns of the sample.
We plot the absolute value of the difference between the SQUID loop flux
in the centers of the two-junction or three-junction rings, and the zero-junction
control ring. Since each point was taken from a full image, we could judge
the center of the rings with accuracy, and our data scatter is much smaller
than in the calibration runs. The solid lines are the expected values for
the flux difference, calculated as described above. In all of our measurements These experiments show clearly that the three-junction ring spontaneously
magnetizes with half of the conventional flux quantum in it, consistent
with the order parameter in YBa Figure
16 shows the actual design parameters for the two samples. Junctions
result each time a ring crosses a grain boundary. The zero-junction rings
and two-junction rings should show integer flux quantization. Only the
three-junction ring in the Figure
16 compares scanning SQUID microscope images from a YBa The calculation of the intensities of the scanning SQUID ring images
described above requires detailed knowledge of the self-inductance of the
rings and the mutual inductance between the rings and the pickup loop [31].
Results from a more direct, accurate, and absolute method are presented
in Figure
17. This figure shows the SQUID sensor signal at the center of
the ring, relative to the signal outside the ring, for all of the rings
as a function of field applied by a coil surrounding the microscope. The
SQUID difference signal goes to zero when there is as much flux inside
the ring as outside it. Therefore, the difference in flux through the rings
is just the difference in applied field required to make the signal go
to zero times the effective area of the ring. Estimating the effective
area of the rings [36]
to be
100 pH). For the same SQUID technology and pickup loop dimensions, the
integrated design is five to ten times more sensitive than the discrete
design. Figure
2(c) shows expanded views of the key regions of our original integrated
device. The pickup loop is an octagon 10 µ m across, with 1.2-µ
m linewidth. There is a 20-µ m-long section of coplanar lead structure
with a transition to a low-inductance strip-line. The octagonal pickup
loop has an area of 82 µ m
,
while the coplanar lead structure has an additional pickup area of
50 µ m
. The strip-line
configuration, which is approximately 1.2 mm in length, is insensitive
to normal fields, but has an orthogonal pickup area of 0.3-0.4 µ
m
per µ m of strip-line
length. The strip-line pickup area has not significantly affected the response
of the magnetometer in the present microscope geometry. In future designs
the strip-line can be replaced with a totally enclosed "coaxial" structure
with zero pickup area. The pickup from the coplanar leads is more problematic,
but in new designs can be greatly reduced by extending the strip-line structure
much closer to the pickup loop. At the other end of the strip-line are
the SQUID's junction and modulation structures. The 1-µ m Nb-Al
O
-Nb
junctions and associated resistive shunts are as described elsewhere [19].
Flux modulation and bias are accomplished by passing current I
through a single-turn coil around a 10-µ m-hole-size square washer
configured in series with the strip-line and pickup loop. This avoids direct
coupling to the measurement volume, which is of concern in designs where
the pickup loop constitutes the entire SQUID inductance. The feed of the
bias current I
in the
present design is asymmetric, a feature that can lead to small shifts in
the voltage-flux response along the flux axis as the pickup loop inductance
is modulated via proximity to superconducting objects. This effect, while
thus far small, can be eliminated by using a resistive split-feed arrangement.
Operating in a flux-locked loop at 100 kHz modulation frequency, the noise
of the device is typically < 2 µ 
/Hz
,
corresponding to a field noise at the pickup loop of
4 × 10
G/Hz
.
Sensitivity
Figure
4 illustrates the sensitivity of the scanning SQUID microscope
to permanent magnetic moments. This image is of the magnetic field about
15 µ m above the surface of a commercial 5.25-in.-diameter floppy
disk. This particular image was taken with the pickup loop plane oriented
normal to the sample and nearly parallel to the track axis (nearly horizontal
in this image). The region of the floppy disk that is being imaged contains
alignment marks with magnetic domains with moments in the plane of the
surface, oriented in alternate directions normal to the track direction.
The false-color coding of this image, which appears consistently throughout
this paper, uses a spectral distribution from dark blue to bright red.
In this image dark blue represents flux passing through the loop in one
direction, while red is flux in the opposite direction. The total scale
represented by the false-color imaging scheme is about 30
change in flux through the SQUID pickup loop, corresponding to a total
field variation of about 5 gauss. Since the effective noise of the SQUID
and electronics, expressed as an effective noise at the SQUID loop, is
typically about 2 × 10

,
and images are taken at a pixel rate of about 5 Hz, this means that such
an image has a potential signal-to-noise ratio of order 10
.
Other factors, such as the dynamic range of our amplifiers and analog-digital
converters, limit the actual signal-to-noise ratio, and there are easier
methods for imaging bit patterns, but this is clearly a very sensitive
technique. Our calculations indicate that a 1-µ m-diameter pickup
loop spaced 1 µ m from a permanent magnetic source should be able
to detect about 100 µ
.
The full power of scanning SQUID microscopy will result from applications
where this sensitivity is used to advantage.
from parallel to the sample. An external magnetic field of about 5.4 mG
was applied to the sample to make the superconducting meander visible.
Meissner exclusion of magnetic field from the sample screens the sensor
from the applied field above the meander, and concentrates the field in
the interline regions. Meissner screening by superconducting thin films
is very useful for making index marks for the scanning SQUID microscope
using superconducting thin films. The index marks can be made visible by
applying a small external field, and made nearly invisible by turning the
field off. The "ghosting" visible in the bottom of this image is caused
by additional pickup from the unshielded pickup leads. The influence of
the pickup geometry on the observed images is discussed in more detail
below.


,
corresponding to an effective current noise of about 1 nA/
Hz.
Applications
Imaging of superconducting
circuitry
As an example of an application of this technique, the images in Figure
7 show the normal component of the magnetic field above a high-T
thin-film YBa
Cu
O
-
step-edge-junction washer SQUID [20],
imaged using the integrated SQUID magnetometer. It is desirable for device
applications to minimize hysteresis in the SQUID response vs. applied field
characteristics. Such hysteresis can result from trapping and motion of
vortices in the superconducting film [21].
The device imaged in Figure
7, which has a scratch running through it from the upper left to center
right of the image, has particularly large hysteresis. All of the images
in Figure
7 were taken at 4.2 K in an applied field less than 2 mG. Figure
7(a) images the sample as cooled in a field of about 2 mG. Eighteen
trapped bulk vortices are visible in the dark green "washer" of this device.
This trapped flux generates screening currents which circulate around the
device, generating fields which make the outline of the device visible,
even in the absence of an external applied field. The image of Figure
7(b) was taken after the device was cycled to 0.6 G at 4.2 K. Notice
that a single flux "bundle" is trapped in the upper right corner of the
device washer, just where the scratch crosses it. Figure
7(c) was taken after the device was cycled to 2.2 G at 4.2 K. As the
sample was cycled to successively higher fields, more flux was trapped
along the scratch. Finally, the image in Figure
7(d) was taken after the sample was cycled to 2.4 G at 77 K before
cooling to 4.2 K for imaging. In addition to flux trapped in the scratch,
vortices are also trapped in the inside corners of the square hole in the
washer. These images show that flux traps first at thin-film defects, and
then at locations where the magnetic field strengths are largest--at inside
corners.
(1)
parallel
to a superconducting surface and centered a height h above a flux
vortex trapped in the superconductor. The total flux through this loop
is
(2)
,
the amount of flux coupling into the pickup loop is about 0.3
.
Typically our images are taken at about 5 pixels/s, which means that with
a SQUID noise of 2 × 10

/Hz
an individual vortex can be imaged with an electronic signal-to-noise ratio
of about 7 × 10
. Actual
signal-to-noise ratios, although limited by scanning irregularities apparently
arising from tip-sample interactions, are nevertheless remarkably good,
as can be seen from the cross sections in Figure
8. The solid lines in Figure
8 are fits to the data numerically integrating Equation (1), using
the known pickup loop and lead geometry, the known angle of the SQUID plane
relative to the sample plane (
20
), with the distance between
the tip and the pickup loop center as the only fitting parameter. The best
fit was obtained for a distance of 8 µ m, in reasonable agreement
with microscopic inspection of the tip after polishing. The fits show that
we have a good understanding of the absolute magnitude and general shape
of the observed vortex images.
Half-integer flux quantum
effect
Perhaps the single most contested issue in solid-state physics at present
is the mechanism for superconductivity in the high-critical-temperature
copper-oxide ceramic superconductors. An unambiguous determination of the
order parameter symmetry is crucial to understanding this mechanism. For
example, spin-mediated coupling mechanisms can be nearly ruled out if the
order parameter does not have d
symmetry [
(k)
k
- k
cos 2
] [23].
Recently, there have been numerous experiments [24-29]
dealing with various aspects of pairing symmetry in high-T
superconductors. A number of experimental tests which favor d-wave symmetry
are sensitive only to the absolute number of states in the gap, often only
in the surface of the sample. A more unambiguous test of d-wave symmetry
would be one that is sensitive to the sign of the order parameter. One
such test was proposed several years ago [30]
and performed by Wollman et al. [25].
This test measures the critical current of a SQUID fabricated with a superconducting
Pb film forming Josephson junctions with two adjacent corners of a YBa
Cu
O
-
single crystal. If YBa
Cu
O
-
were an s-wave superconductor, such a SQUID would be expected to show the
conventional maximum critical current at zero applied field. A d-wave superconductor,
on the other hand, should experience canceling contributions from supercurrents
of opposite signs on the two orthogonal faces, and should have a minimum
supercurrent at zero applied bias. The latter effect was in fact observed,
supporting d-wave symmetry for YBa
Cu
O
-
.
However, this experiment was subject to a great deal of criticism, because
of possible interferences introduced by trapped flux, flux focusing effects
at corners, and difficulties in extrapolating the experimental data to
zero voltage.
Cu
O
-
order parameter that depends on the principle of flux quantization, rather
than on details of the SQUID current-voltage characteristic, and used the
scanning SQUID microscope described in this paper to make this test. The
basic idea behind this test is as follows: Consider a superconducting ring
that is interrupted by one Josephson weak link with a change in sign of
the order parameter across the weak link boundary. This discontinuity costs
Josephson coupling energy. If this Josephson coupling energy is sufficiently
large to overcome the inductive energy associated with supercurrent around
the ring, it is energetically favorable for the ring to spontaneously generate
sufficient supercurrent to have exactly half of the conventional flux quantum, 
/2
= h/4e, threading the ring. It is very difficult to design a ring
with a sign change across just one junction, but the same physics holds
for rings with an odd number of sign changes. Tsuei et al. proposed a three-junction
tricrystal geometry that should show the half-integer spontaneous magnetization
if the superconducting order parameter in YBa
Cu
O
-
has d-wave symmetry.
substrate
that was cut into three pieces, reoriented, polished, and fused to form
a tricrystal substrate with the crystalline orientations indicated in Figure
11. YBa
Cu
O
-
was epitaxially grown with the c-axis up on the tricrystal substrate, forming
grain boundaries (GB) at the boundaries between the sections of the underlying
substrate. These boundaries act as Josephson weak links between the sections
of the thin-film weak links. As pointed out by Sigrist and Rice [32],
since the Josephson critical current across such a weak link is dominated
by tunneling from Cooper pairs propagating normal to the interface, this
critical current is proportional to the product of the projections onto
the interface normal of the momentum-dependent order parameters on the
two sides of the interface. This is indicated schematically for an assumed
d-wave symmetry of the order parameter in Figure
11. The polar plots in this figure indicate the magnitude of the order
parameter (k
- k
)
as a function of Cooper pair momentum in the crystal coordinate system.
These polar plots show that one of the interfaces, between sections 1 and
3 of the central three-junction ring, has a negative Josephson critical
current. The Josephson relation between the current I and the order
parameter phase difference
across the junction can then be written as
| sin(
)
= |I
| sin(
+
), (3)
is the critical
current of the junction. A junction with a negative critical current is
called a
-junction; a ring
with an odd number of
-junctions
is called a
-ring. Sigrist
and Rice [32]
showed that a single-junction
-ring
should have half-integer spontaneous magnetization. Tsuei et al. [31]
extended this analysis to show that
-rings
with multiple junctions should also show this effect. Tsuei et al. [31]
also showed that the geometry indicated schematically in Figure
11 should exhibit the half-integer effect independent of the degree
of interface roughness present.
Cu
O
-
films grown in this way are highly twinned. However, twin boundaries are
very strong Josephson links, so that the order parameter in one particular
section of a ring should be tightly coupled, with discontinuous changes
in the phase only occurring at the grain boundaries.
Cu
O
-
films for these junctions were laser-deposited in the same run and in close
proximity to the tricrystal substrate for the four rings. The values of
I

(J

)
for these three test junctions agree within 20%. I

(J

)
is found to be 1.8 mA (1.5 × 10
A/cm
). The resistive transitions
of these films were sharp, with a small shoulder below the T
(= 90.7 K) characteristic of a grain-boundary weak link. The IV
curve of the control junctions exhibited a typical RSJ Josephson junction
characteristic.


value and the estimated self-inductance of the rings (L
100 pH) one finds that the LI

product is about 100
,
easily satisfying the condition LI


required by the energy considerations described above. Therefore, a spontaneous
magnetization of 
/2
at 


0 should be observable in our three-junction ring.
away from parallel to the sample plane. The ratio of the mutual inductance
between loop and ring to the self-inductance of the ring is about 0.02,
so that the effect of the SQUID flux coupling back into the ring should
be small. Our interpretation of this image is that the outer zero-junction
ring (lower left in this image) and two-junction rings (right and upper
left) have no flux threading them, while the central three-junction ring
has half of the flux quantum h/2e threading it. The outer control
rings are visible through mutual inductance coupling between the rings
and the SQUID loop.
)
between a pickup loop tilted at an angle
from the sample (xy) plane in the xz plane, and a circular
wire of radius R at the origin, is given by
(4)
x
is over the plane of the pickup loop, and the vector
specifies the displacement of the pickup loop with respect to the ring
in the xy plane. We calculate M(0) = 2.4 pH for the as-fabricated
tip centered above a 29-µ m-radius ring, at a tilt angle of 20
.
A given flux
threading
a superconducting ring with self-inductance L induces a circulating
current I
=
/L
around the ring, which in turn induces a flux 
(
)
= M(
)
/L
in the pickup (sensor) loop. We calculate the inductance of our rings to
be 99 ± 5 pH.
= 
/2
= h/4e in the three-junction ring. The asymmetry in the images results
from the tilt of the pickup loop, as well as the asymmetric pickup area
from the unshielded section of the leads. Clearly, using 
/2
for the flux in the three-junction ring results in much better agreement
than would be obtained using 
.


= 0.0237
.
This is in good agreement with our calculated value of 

= M(0)
/L
= 0.024 ± 0.003
.
Twelve repetitions of this measurement, including measurements of both
the two-junction and three-junction rings, gave values of M(0)
/L
= 0.028 ± 0.005
.
The large uncertainties in these calibration runs have two sources: Small
misalignments in the position of the loop relative to the center of the
rings result in relatively large errors, as can be seen from the cross
sections of Figure
14. Further, the step heights on average increase with time, as the
tip wears while taking
100 images in direct contact with the sample, moving the pickup loop progressively
closer to the ring plane. Visual inspection of the loop at the end of these
measurements showed extensive wear, such that the point of contact was
within 2 µ m of the pickup loop edge.
B = 
/A


,
where A


= 2642 µ m
is the effective
area of the rings. This is not too surprising, given the nonequilibrium
nature of the flux penetration process, as indicated by the hysteresis
in the flux-field characteristic. The average slope of the flux-field characteristic
does, however, agree within experimental error with the effective area
of the rings.

always fell close to (N + 1/2) (h/2e) for the three-junction
ring, and close to Nh/2e for the two-junction rings (N is
an integer). However, there is clearly some drift to the data, which we
associate with tip wear. A fit to the eight 
/2
points in Figure
15(b), assuming that exactly h/4e flux threads the three-junction
rings, implies that the mutual inductance M(0) is 2.4 pH for the
as-fabricated tip and increases to 2.9 pH at the end of the series. For
comparison, our calculations give 2.4 pH for the center of the loop 10
µ m from the tip end, and 2.7 pH for the tip end just at the edge
of the pickup loop. The dashed lines, including this correction to the
mutual inductance, agree remarkably well with the data.
Cu
O
-
having d-wave symmetry. However, there have been at least two alternate
mechanisms, spin-flip scattering by magnetic impurities at the tunnel barrier
[34]
and indirect tunneling through a localized state (correlation effects)
[35],
suggested to cause
-phase
shifts at the junction interfaces, resulting in
-rings
in our three-junction rings. Kirtley et al. [36]
have designed a tricrystal substrate with angles chosen so that, according
to the predictions for d-wave pairing, the three-junction rings will not
be
-rings, either in the
clean (smooth interface) or dirty (rough interface) limits. The failure
to observe half-integer flux quantization in this geometry would rule out
symmetry-independent mechanisms.
-ring
geometry should show the half-integer quantum effect if it is due to nodes
in the superconducting order parameter, but both three-junction rings should
show the effect if it is due to a symmetry-independent mechanism. The only
difference between sample fabrication and measurement of the two samples
was the tricrystal substrate geometry.
Cu
O
-
tricrystal ring sample with the
-ring
geometry (left) and the 0-ring geometry (right) cooled to the measuring
temperature of 4.2 K in fields less than 2 mG. The images were taken with
the SQUID substrate oriented about 20
from parallel to and in direct contact with the sample, so that the loop
sampled primarily the normal component of the magnetic field about 5 µ
m above the sample surface. The flux threading through the center three-junction
ring in the
-ring geometry
sample (a) is very close to 
/2,
while the others have very close to 0 flux. The false-color table in this
image spans a range of 0.03
change in flux through the sensor SQUID. Images taken with these samples
cooled in different fields showed that the three-junction
-ring
always had (N + 1/2)
(N is an integer) flux in it, while the three-junction 0-ring always
had N
,
ruling out symmetry-independent mechanisms for the half-integer flux quantization.
[(r



)/2]
= 2642 ± 80 µ m
,
where r
= 24 µ m and r

= 34 µ m are respectively the inner and outer radii of the rings,
the three-junction ring in Figure
15(a) has 0.505 ± 0.02
more flux threading through it than the zero-junction or two-junction rings.
Further, the difference in flux between any of the other rings in either
the
-ring or the 0-ring geometries
is |
|
< 0.01
.
Our calculations indicate that any, e.g., s-wave component to a presumed
s + id superconducting order parameter would alter the flux quantization
condition away from exactly 
/2
by roughly the fractional portion that is s-wave. These experiments therefore
indicate that the superconducting order parameter has lobes and nodes consistent
with d-wave symmetry and put experimental limits of about 4% on any out-of-phase
s-wave component in YBa
Cu
O
-
.
Conclusion
In conclusion, the scanning SQUID microscope represents a very sensitive
instrument for imaging local magnetic fields. Currently, resolution of
10 µ m has been demonstrated; ultimately an order of magnitude better
resolution should be possible. The sensitivity of this instrument is such
that spins of about a hundred µ
,
or currents of a few nA, can be imaged. This sensitivity allows measurements
that would be extremely difficult using any other technique, such as the
first observation of the half-integer flux quantum effect.
Acknowledgments
We thank Margaret Manny, Dale Pearson, and the Yorktown Silicon Facility
for help in fabrication of the magnetometer and some of the early SQUID
pickup loops. We would also like to thank M. Bhushan for fabrication of
the high-resolution sensors mentioned briefly here. The technical assistance
of S. H. Blanton, G. Trafas, M. Cali, and J. Hurd is greatly appreciated.
Useful discussions with D. J. Scalapino, D. H. Lee, D. M. Newns, M. Sigrist,
and P. Chaudhari are gratefully acknowledged. This work was performed under
the auspices of the Consortium for Superconducting Electronics, which is
partially supported by the Advanced Research Projects Agency under Contract
No. MDA972-90-C-0021.
References
and notes
Received October 10, 1994; accepted for publication September 13, 1995
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